Thin Metal Oxide Films: Processing, Properties and Applications

Lecturer(s)

Prof. L. J. Gauckler, Dr. A. Infortuna, Dr. A. Bieberle & Dr. J. Rupp

Hour(s) of lecture(s), exercise(s) and credit points

2L
2E
4CP

Teaching goals

The course provides fundamental knowledge on modern material syntheses in materials engineering and science. This emergency technology equips the students with knowledge in processing both elementary pure materials and compounds that can be prepared in their crystalline, polycrystalline, nanocrystalline or amorphous forms. The course is designed to be receipt type, implying practical advice and guidance on the deposition of thin films used in industry and science. The course is an important stage between the school and industrial and scientific practice.

Summary and outline

Definition of thin films: Environment (Gas phase and plasma) for thin film deposition; Requirement for substrate; Substrate cleaning, nanocrystalline thin film.
Structure of thin films: Formation of thin films (sticking coefficient, formation of thermodynamically stable cluster ¡V nucleation); Microstructure, Surface roughness; Density; Stress in thin films; Adhesion; Stoichiometry; Metastable structures.
Physical parameters for evaluation of thin films: Mechanical, electrical, thermal, chemical, optical.
Physical deposition techniques: Thermal evaporation, resistance evaporation; Electron beam evaporation); Molecular beam epitaxy; Laser ablation; Ion vapor evaporation and Cathodic arc deposition.Electrical discharges used in thin film deposition: Sputtering; Glow discharge sputtering; Magnetron sputtering; Ion beam sputtering; Ion plating; Oxidizing and Nitriding.
Chemical deposition techniques: Chemical vapor deposition (CVD); Spray depostion and spin coating.
Processing Technologies: Pattern transfer: Reactive ion etching, Ion milling, Ion beam dry etching.
Deposition of advanced materials, e.g. nanocrystalline metal and ceramic coating.
Special applications of metal oxide thin films for sensors and fuel cells are covered.During the exercises the students will be trained in the lab making MeO films and evaluating their properties.

Literature

Lecture notes will be provided toghether with further supporting material

M. Ohring, “Materials science of thin films”, Academic Press
A. Elshabini-Riad, F.D. Barlow, “Thin film technology handbook”, Mc Graw Hill